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Advances in resist technology and processing XX : 24-26 February, 2003, Santa Clara, California, USA

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2003Description: 2 v. : ill. ; 28 cmISBN:
  • 9780819448446
Subject(s): DDC classification:
  • 621.381531 FED
Item type:
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