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Advances in resist technology and processing XVIII : 26-28 February, 2001, Santa Clara, [California] USA

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2001Description: 2 v. (xxix, 1084 p.) : ill. ; 28 cmISBN:
  • 9780819440310
Subject(s): DDC classification:
  • 621.381531 HOU
Item type:
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