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Advances in resist technology and processing XVII : 28 February-1 march, 2000, Santa Clara, USA

By: Material type: TextTextPublication details: Bellingham, WA: SPIE, 2000Description: xvii, 618 p. : ill. ; 29 cmISBN:
  • 9780819436177
Subject(s): DDC classification:
  • 686.2325 HOU
Item type:
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