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Advances in resist technology and processing XIX : 4-6 March, 2002, Santa Clara, [California] USA

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2002Description: 2 v. : ill. ; 28 cmISBN:
  • 9780819444363
Subject(s): DDC classification:
  • 621.3815 FED
Item type:
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