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Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA

Contributor(s): Material type: TextTextPublication details: Bellingham, Wash: SPIE, 2005Description: 1 v. (various pagings) : ill. ; 28 cmISBN:
  • 9780819459268
Subject(s): DDC classification:
  • 681.25 ASS
Item type:
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