Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998 (Record no. 27304)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00605nam a2200133Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 211224s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783908450399 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 KIT |
| 245 #0 - TITLE STATEMENT | |
| Title | Beam injection assessment of defects in semiconductors : proceedings of the 5th international workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98), held in Park hotel Schloss Wulkow near Berlin, Germany, August 30-september 3, 1998 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Hampshire, USA: |
| Name of publisher, distributor, etc. | Scitec Publications, |
| Date of publication, distribution, etc. | 1998 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 537 p. : ill. ; 24 CM. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Engineering |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Breitenstein, O |
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