An introduction to surface-micromachining (Record no. 17854)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00422nam a2200145Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 211224s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781402080203 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 671.35 JOH |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Johnstone, Robert W |
| 245 #3 - TITLE STATEMENT | |
| Title | An introduction to surface-micromachining |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boston: |
| Name of publisher, distributor, etc. | Kluwer Academic Publishers, |
| Date of publication, distribution, etc. | 2004 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | x, 186 p. : ill. ; 25 cm |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Micromachining |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Parameswaran, M |
No items available.