Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States (Record no. 15316)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00481nam a2200133Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 211224s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819480514 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 HER |
| 245 #0 - TITLE STATEMENT | |
| Title | Alternative lithographic technologies II : 23-25 February 2010, San Jose, California, United States |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, Wash: |
| Name of publisher, distributor, etc. | SPIE, |
| Date of publication, distribution, etc. | 2010 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 v. (various pagings) : ill. ; 28 cm |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Extreme ultraviolet lithography - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Herr, Daniel J. C |
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