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An introduction to surface-micromachining

Johnstone, Robert W

An introduction to surface-micromachining - Boston: Kluwer Academic Publishers, 2004 - x, 186 p. : ill. ; 25 cm

ISBN: 9781402080203

Subjects--Topical Terms:
Micromachining

Dewey Class. No.: 671.35 JOH

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