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Alternative lithography : unleashing the potentials of nanotechnology

Alternative lithography : unleashing the potentials of nanotechnology - Boston: Kluwer Academic/Plenum, 2003 - xx, 333 p. : ill. ; 26 cm

ISBN: 9780306478581

Subjects--Topical Terms:
Microlithography

Dewey Class. No.: 621.381531 SOT

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