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Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA

Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA - Bellingham, Wash: SPIE, 2005 - 1 v. (various pagings) : ill. ; 28 cm

ISBN: 9780819459268

Subjects--Topical Terms:
Laser interferometers - Congresses

Dewey Class. No.: 681.25 ASS

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