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Advanced processes for 193-nm immersion lithography

Wei, Yayi

Advanced processes for 193-nm immersion lithography - Bellingham, Wash: SPIE, 2009 - xix, 315 p. : ill. ; 26 cm

ISBN: 9780819475572

Subjects--Topical Terms:
Immersion lithography

Dewey Class. No.: 621.381531 WEI

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