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Advanced microlithography technologies : 8-10 November, 2004, Beijing, China

Advanced microlithography technologies : 8-10 November, 2004, Beijing, China - Bellingham, Wash: SPIE, 2005 - xi, 380 p. : ill. ; 28 cm

ISBN: 9780819456007

Subjects--Topical Terms:
Integrated circuits - Masks - Congresses

Dewey Class. No.: 621.381531 WAN

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