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Advanced fabrication technologies for micro/nano optics and photonics III : 25-27 January 2010, San Francisco, California, United States

Advanced fabrication technologies for micro/nano optics and photonics III : 25-27 January 2010, San Francisco, California, United States - Bellingham, Wash: SPIE, 2010 - 1 v. (various pagings) : ill. ; 27 cm

ISBN: 9780819479877

Subjects--Topical Terms:
Microelectromechanical systems - Congresses

Dewey Class. No.: 620.5 SCH

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